Tuning In-Plane Fixed-Fixed Beam Resonators With Embedded...

IEEE Electron Device Letters 2015 / 2 Vol. 36; Iss. 2

Tuning In-Plane Fixed-Fixed Beam Resonators With Embedded Heater in CMOS Technology

Goktas, Hasan, Zaghloul, Mona E.
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Volume:
36
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2014.2381557
Date:
February, 2015
File:
PDF, 1.34 MB
english, 2015
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