Investigation of the nucleation and growth of SiC nanostructures on Si
F. Scharmann, P. Maslarski, W. Attenberger, J.K.N. Lindner, B. Stritzker, Th. Stauden, J. PezoldtVolume:
380
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(00)01476-0
File:
PDF, 1.16 MB
english, 2000