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Growth of patterned thin epitaxial CoSi2-films by a titanium oxide mediated epitaxy process
P Kluth, C Detavernier, Q.-T Zhao, J Xu, H.-P Bochem, St Lenk, S MantlVolume:
380
Year:
2000
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(00)01504-2
File:
PDF, 959 KB
english, 2000