Optical emission patterns and microwave field distributions...

Optical emission patterns and microwave field distributions in a cylindrical microwave plasma source

Fang Fang, Rongqing Liang, Qiongrong Ou, Yifeng Sui
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Volume:
390
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(01)00919-1
File:
PDF, 650 KB
english, 2001
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