![](/img/cover-not-exists.png)
Optical emission patterns and microwave field distributions in a cylindrical microwave plasma source
Fang Fang, Rongqing Liang, Qiongrong Ou, Yifeng SuiVolume:
390
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(01)00919-1
File:
PDF, 650 KB
english, 2001