Large-area uniform dust-free plasma CVD

Thin Solid Films 2001 Vol. 390; Iss. 1-2

Large-area uniform dust-free plasma CVD

Hiroshi Fujiyama, Yoko Maemura, Toru Yamaguchi
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Volume:
390
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(01)00941-5
File:
PDF, 1.20 MB
english, 2001
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