Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH4
Yoshitaka Nozaki, Makiko Kitazoe, Katsuhiko Horii, Hironobu Umemoto, Atsushi Masuda, Hideki MatsumuraVolume:
395
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(01)01205-6
File:
PDF, 87 KB
english, 2001