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Volume 395; Issue 1-2
Main
Thin Solid Films
Volume 395; Issue 1-2
Thin Solid Films
Volume 395; Issue 1-2
1
Preface
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 45 KB
Your tags:
english, 2001
2
Summary of research in NEDO Cat-CVD project in Japan
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 698 KB
Your tags:
english, 2001
3
Status of Cat-CVD (Hot Wire CVD) research in the United States
A.H. Mahan
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 282 KB
Your tags:
english, 2001
4
Status of Cat-CVD (Hot-Wire CVD) research in Europe
R.E.I Schropp
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 218 KB
Your tags:
english, 2001
5
Some physics and chemistry of hot-wire deposition
Alan Gallagher
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 60 KB
Your tags:
english, 2001
6
Gas phase and surface kinetic processes in polycrystalline silicon hot-wire chemical vapor deposition
J.K Holt
,
M Swiatek
,
D.G Goodwin
,
R.P Muller
,
W.A Goddard III
,
Harry A Atwater
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 236 KB
Your tags:
english, 2001
7
The effect of filament temperature on the gaseous radicals in the hot wire decomposition of silane
H.L Duan
,
G.A Zaharias
,
Stacey F Bent
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 102 KB
Your tags:
english, 2001
8
Catalytic decomposition of SiH4 on a hot filament
Shinya Tange
,
Keisuke Inoue
,
Kenichi Tonokura
,
Mitsuo Koshi
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 126 KB
Your tags:
english, 2001
9
Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH4
Yoshitaka Nozaki
,
Makiko Kitazoe
,
Katsuhiko Horii
,
Hironobu Umemoto
,
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 87 KB
Your tags:
english, 2001
10
Effect of hot filament on preparation of YBCO superconducting films by pulsed laser ablation in nitrous oxide gas
A Morimoto
,
K Asada
,
T Minamikawa
,
Y Yonezawa
,
T Shimizu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 431 KB
Your tags:
english, 2001
11
Development of the Cat-CVD apparatus and its feasibility for mass production
Keiji Ishibashi
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 256 KB
Your tags:
english, 2001
12
Influence of gas supply and filament geometry on the large-area deposition of amorphous silicon by hot-wire CVD
Andrea Ledermann
,
Urban Weber
,
Chandrachur Mukherjee
,
Bernd Schroeder
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 563 KB
Your tags:
english, 2001
13
Hot-wire CVD growth simulation for thickness uniformity
Jaydeep V. Sali
,
S.B. Patil
,
S.R. Jadkar
,
M.G. Takwale
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 136 KB
Your tags:
english, 2001
14
Development of Cat-CVD apparatus — a method to control wafer temperatures under thermal influence of heated catalyzer
Minoru Karasawa
,
Atsushi Masuda
,
Keiji Ishibashi
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 387 KB
Your tags:
english, 2001
15
Novel chamber cleaning method using atomic hydrogen generated by hot catalyzer
Kenji Uchida
,
Akira Izumi
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 210 KB
Your tags:
english, 2001
16
Elastic properties of amorphous and nanocrystalline silicon
Richard S Crandall
,
Xiao Liu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 119 KB
Your tags:
english, 2001
17
Photo-induced volume changes in a-Si:H films prepared by Cat-CVD method
Takashi Hatano
,
Yoshiaki Nakae
,
Hiromi Mori
,
Kaori Ohkado
,
Norimitsu Yoshida
,
Shuichi Nonomura
,
Masaya Itoh
,
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 133 KB
Your tags:
english, 2001
18
Hot-wire produced atomic hydrogen: effects during and after amorphous-silicon deposition
A.M Brockhoff
,
W.F van der Weg
,
F.H.P.M Habraken
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 142 KB
Your tags:
english, 2001
19
Hydrogenation of laser-crystallized poly-silicon thin films and characterization of defects using a catalytic method
Kuninori Kitahara
,
Hiroyuki Nogi
,
Akihiro Moritani
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 188 KB
Your tags:
english, 2001
20
Electrical transport properties of microcrystalline silicon thin films prepared by Cat-CVD
F Liu
,
M Zhu
,
Y Feng
,
Y Han
,
J Liu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 103 KB
Your tags:
english, 2001
21
Hydrogen-induced electronic states and vibrational modes in hydrogenated amorphous silicon nitride
Shu-Ya Lin
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 247 KB
Your tags:
english, 2001
22
Amorphous and microcrystalline silicon deposited by hot-wire chemical vapor deposition at low substrate temperatures: application to devices and thin-film microelectromechanical systems
J.P Conde
,
P Alpuim
,
M Boucinha
,
J Gaspar
,
V Chu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 504 KB
Your tags:
english, 2001
23
Guiding principles for device-grade hydrogenated amorphous silicon films and design of catalytic chemical vapor deposition apparatus
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 91 KB
Your tags:
english, 2001
24
Influence of atomic hydrogen on the growth kinetics of a-Si:H films and on the properties of silicon substrates
H Seitz
,
S Bauer
,
R.O Dusane
,
B Schröder
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 95 KB
Your tags:
english, 2001
25
Is the nucleation and coalescence behavior in the growth of a-Si:H films prepared by the CAT-CVD different?
R.O Dusane
,
S Bauer
,
B Schröder
,
H Oechsner
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 92 KB
Your tags:
english, 2001
26
Investigations on doping of amorphous and nanocrystalline silicon films deposited by catalytic chemical vapour deposition
M Fonrodona
,
D Soler
,
J Bertomeu
,
J Andreu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 85 KB
Your tags:
english, 2001
27
Depth profiling and the effect of oxygen and carbon on the photoelectrical properties of amorphous silicon films deposited using tungsten wire filaments
S.K Persheyev
,
D.M Goldie
,
R.A.G Gibson
,
M.J Rose
,
S Anthony
,
D.J Keeble
,
K Robb
,
C Main
,
S Reynolds
,
I Zrinscak
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 101 KB
Your tags:
english, 2001
28
Electronic states and the light-induced metastability in hydrogenated amorphous silicon prepared by hot-wire CVD
Daxing Han
,
Guozhen Yue
,
H Habuchi
,
Eugene Iwaniczko
,
Qi Wang
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 107 KB
Your tags:
english, 2001
29
High-stability hydrogenated amorphous silicon films for light-soaking prepared by catalytic CVD at high deposition rates
Masaya Itoh
,
Yoriko Ishibashi
,
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 195 KB
Your tags:
english, 2001
30
Hot-wire deposition of photonic-grade amorphous silicon
C.M Fortmann
,
E.L Jaen
,
N Hata
,
W.A Anderson
,
A.H Mahan
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 569 KB
Your tags:
english, 2001
31
Influence of a-Si:H deposition by catalytic CVD on transparent conducting oxides
Kensaku Imamori
,
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 230 KB
Your tags:
english, 2001
32
High-rate deposition of silicon thin-film solar cells by the hot-wire cell method
Makoto Konagai
,
Takeshi Tsushima
,
Myoung-Kyu Kim
,
Koichi Asakusa
,
Akira Yamada
,
Yuriy Kudriavtsev
,
Antonio Villegas
,
Rene Asomoza
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 130 KB
Your tags:
english, 2001
33
Growth mechanisms and structural properties of microcrystalline silicon films deposited by catalytic CVD
C. Niikura
,
S.Y. Kim
,
B. Drévillon
,
Y. Poissant
,
P. Roca i Cabarrocas
,
J.E. Bourée
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 293 KB
Your tags:
english, 2001
34
Correlated structural and electronic properties of microcrystalline silicon films deposited at low temperature by catalytic CVD
J.E. Bourée
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 128 KB
Your tags:
english, 2001
35
Hot-wire CVD-grown microcrystalline silicon films with and without initial growing layer modification by transformer-coupled plasma
D.Y Kim
,
B.J Ahn
,
S.I Moon
,
J Yi
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 302 KB
Your tags:
english, 2001
36
Nanocrystalline silicon from hot-wire deposition — a photovoltaic material?
K. Brühne
,
M.B. Schubert
,
C. Köhler
,
J.H. Werner
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 136 KB
Your tags:
english, 2001
37
The influence of filament temperature on crystallographic properties of poly-Si films prepared by the hot-wire CVD method
Jeong Chul Lee
,
Ki Hwan Kang
,
Seok Ki Kim
,
Kyung Hoon Yoon
,
Jinsoo Song
,
I Jun Park
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 913 KB
Your tags:
english, 2001
38
Proposal of catalytic chemical sputtering method and its application to prepare large grain size poly-Si
Koji Kamesaki
,
Atsushi Masuda
,
Akira Izumi
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 290 KB
Your tags:
english, 2001
39
The influence of different catalyzers in hot-wire CVD for the deposition of polycrystalline silicon thin films
P.A.T.T van Veenendaal
,
O.L.J Gijzeman
,
J.K Rath
,
R.E.I Schropp
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 89 KB
Your tags:
english, 2001
40
Fundamental considerations regarding the growth of amorphous and microcrystalline silicon and alloy films
Vikram L Dalal
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 73 KB
Your tags:
english, 2001
41
Formation of silicon films for solar cells by the Cat-CVD method
Manabu Komoda
,
Koji Kamesaki
,
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 274 KB
Your tags:
english, 2001
42
Preparation of silicon–carbon alloy films by hot-wire CVD and their properties
Takashi Itoh
,
Yoshiaki Katoh
,
Takao Fujiwara
,
Kazunori Fukunaga
,
Shuichi Nonomura
,
Shoji Nitta
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 100 KB
Your tags:
english, 2001
43
Photoluminescent, wide-bandgap a-SiC:H alloy films deposited by Cat-CVD using acetylene
Alka Kumbhar
,
Samadhan B Patil
,
Sanjay Kumar
,
R Lal
,
R.O Dusane
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 92 KB
Your tags:
english, 2001
44
Fabrication of amorphous carbon nitride films by hot-wire chemical vapor deposition
Haruo Yokomichi
,
Atsushi Masuda
,
Naoki Kishimoto
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 95 KB
Your tags:
english, 2001
45
Attempt to synthesize carbon nanotubes by hot-wire chemical vapor deposition
H Yokomichi
,
F Sakai
,
M Ichihara
,
N Kishimoto
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 1.07 MB
Your tags:
english, 2001
46
Surface chemical reactions of diamond (100) by Cat-CVD
Xuemei Song
,
Mei Wang
,
Bo Wang
,
Guanghua Chen
,
Hui Yan
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 212 KB
Your tags:
english, 2001
47
Surface modification of silicon related materials using a catalytic CVD system for ULSI applications
Akira Izumi
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 252 KB
Your tags:
english, 2001
48
The role of hydrogen dilution of silane and phosphorus doping on hydrogenated microcrystalline silicon (μc-Si:H) films prepared by hot-wire chemical vapor deposition (HW-CVD) technique
S.R Jadkar
,
J.V Sali
,
M.G Takwale
,
D.V Musale
,
S.T Kshirsagar
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 152 KB
Your tags:
english, 2001
49
Structural evaluation of polycrystalline silicon thin films by hot-wire-assisted PECVD
Y Feng
,
M Zhu
,
F Liu
,
J Liu
,
H Han
,
Y Han
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 101 KB
Your tags:
english, 2001
50
Effect of r.f.-plasma assistance in hot-wire CVD on properties of μc-Si:H
Takashi Itoh
,
Hiroki Inouchi
,
Kaori Ohkado
,
Kenji Chikusa
,
Naoki Nakamura
,
Hiroaki Kondo
,
Norimitsu Yoshida
,
Shuichi Nonomura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 159 KB
Your tags:
english, 2001
51
Low temperature epitaxial growth of Si and Si1−yCy films by hot wire cell method
Tatsuro Watahiki
,
Katsuya Abe
,
Hajime Tamura
,
Shinsuke Miyajima
,
Akira Yamada
,
Makoto Konagai
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 185 KB
Your tags:
english, 2001
52
Highly conducting doped microcrystalline silicon (μc-Si:H) at very low substrate temperature by Cat-CVD
R.O Dusane
,
Frank Diehl
,
U Weber
,
B Schröder
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 71 KB
Your tags:
english, 2001
53
High-deposition rate a-Si:H n–i–p solar cells grown by HWCVD
Brent P Nelson
,
Eugene Iwaniczko
,
A.Harv Mahan
,
Qi Wang
,
Yueqin Xu
,
Richard S Crandall
,
Howard M Branz
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 131 KB
Your tags:
english, 2001
54
Fundamental properties of ECR plasma CVD and hydrogen-induced low temperature Si epitaxy
Kimihiro Sasaki
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 309 KB
Your tags:
english, 2001
55
Photo-thermal excitation gas-source MBE growth of super-doped Si:Mn for spin-photonics applications
H Nakayama
,
H Ohta
,
E Kulatov
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 197 KB
Your tags:
english, 2001
56
Current status of the thermo-catalytic (hot-wire) CVD of thin silicon films for photovoltaic applications
Bernd Schroeder
,
Urban Weber
,
Holger Seitz
,
Andrea Ledermann
,
Chandrachur Mukherjee
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 283 KB
Your tags:
english, 2001
57
Single adatom diffusion in homo- and heteroepitaxies of Si and Ge on (100)-2×1 surfaces modeled by MEAM
Kazuki Mae
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 770 KB
Your tags:
english, 2001
58
Charge-trapping defects in Cat-CVD silicon nitride films
T Umeda
,
Y Mochizuki
,
Y Miyoshi
,
Y Nashimoto
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 211 KB
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english, 2001
59
Intrinsic amorphous and microcrystalline silicon by hot-wire-deposition for thin film solar cell applications
Stefan Klein
,
Friedhelm Finger
,
Reinhard Carius
,
Heribert Wagner
,
Martin Stutzmann
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 150 KB
Your tags:
english, 2001
60
Low temperature silicon nitride deposited by Cat-CVD for deep sub-micron metal–oxide–semiconductor devices
Samadhan B Patil
,
Alka Kumbhar
,
Parag Waghmare
,
V Ramgopal Rao
,
R.O Dusane
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 119 KB
Your tags:
english, 2001
61
A Cat-CVD Si3N4 film study and its application to the ULSI process
Yuji Uchiyama
,
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 384 KB
Your tags:
english, 2001
62
Growth of device quality p-type μc-Si:H films by hot-wire CVD for a-Si pin and c-Si heterojunction solar cells
C Mukherjee
,
U Weber
,
H Seitz
,
B Schröder
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 82 KB
Your tags:
english, 2001
63
Low-k silicon nitride film for copper interconnects process prepared by catalytic chemical vapor deposition method at low temperature
Hidekazu Sato
,
Akira Izumi
,
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 472 KB
Your tags:
english, 2001
64
Preparation of SiNx passivation films for PZT ferroelectric capacitors at low substrate temperatures by catalytic CVD
Toshiharu Minamikawa
,
Yasuto Yonezawa
,
Akira Heya
,
Yoshikazu Fujimori
,
Takashi Nakamura
,
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 153 KB
Your tags:
english, 2001
65
Thin film poly-Si formation by Cat-CVD method and its application for solar cells
K Niira
,
H Senta
,
H Hakuma
,
M Komoda
,
H Okui
,
K Fukui
,
H Arimune
,
K Shirasawa
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 980 KB
Your tags:
english, 2001
66
Hot-wire chemical vapor deposition (HWCVD) of fluorocarbon and organosilicon thin films
K.K.S Lau
,
H.G Pryce Lewis
,
S.J Limb
,
M.C Kwan
,
K.K Gleason
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 415 KB
Your tags:
english, 2001
67
Application of hot-wire chemical vapor-deposited Si:H films in thin film transistors and solar cells
Jatindra K Rath
,
Bernd Stannowski
,
Patrick A.T.T van Veenendaal
,
Marieke K van Veen
,
Ruud E.I Schropp
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 869 KB
Your tags:
english, 2001
68
High performance amorphous-silicon thin film transistors prepared by catalytic chemical vapor deposition with high deposition rate
Masahiro Sakai
,
Takayuki Tsutsumi
,
Tatsuo Yoshioka
,
Atsushi Masuda
,
Hideki Matsumura
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 189 KB
Your tags:
english, 2001
69
Stability of hydrogenated nanocrystalline silicon thin-film transistors
A Orpella
,
C Voz
,
J Puigdollers
,
D Dosev
,
M Fonrodona
,
D Soler
,
J Bertomeu
,
J.M Asensi
,
J Andreu
,
R Alcubilla
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 133 KB
Your tags:
english, 2001
70
Hot-wire silicon nitride for thin-film transistors
B Stannowski
,
J.K Rath
,
R.E.I Schropp
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 103 KB
Your tags:
english, 2001
71
Subject Index of Volume 395
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 76 KB
Your tags:
english, 2001
72
Author Index of Volume 395
Journal:
Thin Solid Films
Year:
2001
File:
PDF, 40 KB
Your tags:
2001
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