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Hydrogenation of laser-crystallized poly-silicon thin films and characterization of defects using a catalytic method
Kuninori Kitahara, Hiroyuki Nogi, Akihiro MoritaniVolume:
395
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(01)01217-2
File:
PDF, 188 KB
english, 2001