Preparation of silicon–carbon alloy films by hot-wire CVD and their properties
Takashi Itoh, Yoshiaki Katoh, Takao Fujiwara, Kazunori Fukunaga, Shuichi Nonomura, Shoji NittaVolume:
395
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(01)01260-3
File:
PDF, 100 KB
english, 2001