Low temperature epitaxial growth of Si and Si1−yCy films by...

Thin Solid Films 2001 Vol. 395; Iss. 1-2

Low temperature epitaxial growth of Si and Si1−yCy films by hot wire cell method

Tatsuro Watahiki, Katsuya Abe, Hajime Tamura, Shinsuke Miyajima, Akira Yamada, Makoto Konagai
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Volume:
395
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(01)01272-x
File:
PDF, 185 KB
english, 2001
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