In Situ Doping of 3C-SiC Grown on (0001) Sapphire...

Materials Science Forum 2002 Vol. 389-393

In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD

Sun, Guo Sheng, Luo, M.C., Wang, Lei, Zhu, S.R., Li, Jin Min, Zeng, Yi Ping, Lin, L.Y.
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Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.339
File:
PDF, 320 KB
2002
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