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Effect of Various Cleaning Solutions and Brush Scrubber Kinematics on the Frictional Attributes of Post Copper CMP Cleaning Process
Sampurno, Yasa, Zhuang, Yun, Gu, Xun, Theng, Sian, Nemoto, Takenao, Sun, Ting, Sudargho, Fransisca, Teramoto, Akinobu, Philipossian, Ara, Ohmi, TadahiroVolume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.363
File:
PDF, 1.11 MB
english, 2009