Properties of carbon nitride films deposited by magnetron sputtering
Y Kusano, J.E Evetts, R.E Somekh, I.M HutchingsVolume:
332
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(98)00983-3
File:
PDF, 301 KB
english, 1998