Volume 332; Issue 1-2

Thin Solid Films

Volume 332; Issue 1-2
1

Properties of carbon nitride films deposited by magnetron sputtering

Y Kusano, J.E Evetts, R.E Somekh, I.M Hutchings
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 301 KB
english, 1998
2

Vibrational properties of carbon nitride films by Raman spectroscopy

A.K.M.S. Chowdhury, D.C. Cameron, M.S.J. Hashmi
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 361 KB
english, 1998
7

Mechanical properties of SiO2 and Si3N4 coatings: a BAM/NIST co-operative project

U. Beck, D.T. Smith, G. Reiners, S.J. Dapkunas
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 1.25 MB
english, 1998
8

Depth profiling of non-conductive oxidic multilayers with plasma-based SNMS in HF-mode

J Goschnick, C Natzeck, M Sommer, F Zudock
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 416 KB
english, 1998
9

Hexagonal nitride coatings: electronic and mechanical properties of V2N, Cr2N and δ-MoN

R. Sanjinés, P. Hones, F. Lévy
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 469 KB
english, 1998
10

Sputter deposited chromium nitride based ternary compounds for hard coatings

P Hones, R Sanjinés, F Lévy
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 515 KB
english, 1998
14

Thermal diffusion in molecular dynamics simulations of thin film diamond deposition

B.A. Pailthorpe, D. Mitchell, N.S. Bordes
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 531 KB
english, 1998
15

Ellipsometry and transport studies of thin-film metal nitrides

J Humlı́ček, A Nebojsa, J Hora, M Stráský, J Spousta, T Šikola
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 278 KB
english, 1998
17

Chemical–mechanical polishing for giant magnetoresistance device integration

Y.Z Hu, R.J Gutmann, T.P Chow, B Witcraft
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 362 KB
english, 1998
19

Characterization of multilayered Ti/TiN films grown by chemical vapor deposition

J.C. Hu, T.C. Chang, L.J. Chen, Y.L. Yang, C.Y. Chang
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 611 KB
english, 1998
22

Thick SiOxNy and SiO2 films obtained by PECVD technique at low temperatures

M.I. Alayo, I. Pereyra, M.N.P. Carreño
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 476 KB
english, 1998
26

Laser induced chemical vapor deposition of optical thin films on curved surfaces

S. Tamir, S. Berger, K. Rabinovitch, M. Gilo, R. Dahan
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 296 KB
english, 1998
27

On the hardness of a-C:H films prepared by methane plasma decomposition

F.C. Marques, R.G. Lacerda, G.Y. Odo, C.M. Lepienski
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 244 KB
english, 1998
29

A technique for large area deposition of diamond via combustion flame synthesis

R.T Rozbicki, V.K Sarin
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 451 KB
english, 1998
34

Synthesis and processing of a Cu-In-Ga-Se sputtering target

C. Suryanarayana, E. Ivanov, R. Noufi, M.A. Contreras, J.J. Moore
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 371 KB
english, 1998
35

Texture and surface roughness of PRCVD aluminum films

D. Yang, R. Jonnalagadda, B.R. Rogers, J.T. Hillman, R.F. Foster, T.S. Cale
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 1.22 MB
english, 1998
39

Assessment of post-CMP cleaning mechanisms using statistically-designed experiments

G. Zhang, G. Burdick, F. Dai, T. Bibby, S. Beaudoin
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 433 KB
english, 1998
41

MOS capacitor characteristics of plasma oxide on partially strained SiGeC films

S.K. Ray, L.K. Bera, C.K. Maiti, S. John, S.K. Banerjee
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 209 KB
english, 1998
43

Correlation of predicted and observed optical properties of multilayer thermal control coatings

Donald A Jaworske
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 169 KB
english, 1998
44

Effect of O2 plasma treatment on the properties of SiO2 aerogel film

Hong-Ryul Kim, Hyung-Ho Park, Sang-Hoon Hyun, Geun-Young Yeom
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 360 KB
english, 1998
46

Low parasitic resistance contacts for scaled ULSI devices

C.M Osburn, K.R Bellur
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 487 KB
english, 1998
48

Comparison of mechanical properties of TiN thin films using nanoindentation and bulge test

O.R. Shojaei, A. Karimi
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 512 KB
english, 1998
51

Structural studies of ITO thin films with the Rietveld method

M. Quaas, C. Eggs, H. Wulff
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 249 KB
english, 1998
52

On the energy influx to the substrate during sputter deposition of thin aluminium films

H. Kersten, G.M.W. Kroesen, R. Hippler
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 638 KB
english, 1998
54

Corrosion of titanium-nitride encapsulated silver films exposed to a H2S ambient

Daniel Adams, B.A. Julies, J.W. Mayer, T.L. Alford
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 606 KB
english, 1998
56

Secondary electron imaging of nucleation and growth of semiconductors for nanostructure fabrication

Y Homma
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 864 KB
english, 1998
57

Structural and electrochromic properties of InN thin films

N Asai, Y Inoue, H Sugimura, O Takai
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 387 KB
english, 1998
59

A study on the structural distribution of Se-passivated GaAs surface

Ji-Wan Kim, Seung-Hoon Sa, Min-Gu Kang, Hyung-Ho Park
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 439 KB
english, 1998
60

Influence of stress distribution on adhesion strength of sputtered hard coatings

H.K. Tönshoff, B. Karpuschewski, A. Mohlfeld, H.
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 448 KB
english, 1998
62

Measurement of the micro mechanical properties of sol-gel TiO2 films

Å.K. Jämting, J.M. Bell, M.V. Swain, L.S. Wielunski, R. Clissold
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 339 KB
english, 1998
63

Electrical and microwave characterization of kanthal thin films: temperature and size effect

K.S. Bhat, S.K. Datta, C. Suresh
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 242 KB
english, 1998
64

Material characteristics and chemical–mechanical polishing of aluminum alloy thin films

Y.L Wang, J Wu, C.W Liu, T.C Wang, Jowei Dun
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 543 KB
english, 1998
65

Extremely fast ellipsometry solutions using cascaded neural networks alone

F.K Urban III, D Barton, N.I Boudani
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 324 KB
english, 1998
66

Precursor selection for plasma deposited fluorinated amorphous carbon films

Thomas W. Mountsier, John A. Samuels
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 240 KB
english, 1998
74

Technique for characterization of thin film porosity

D.J Taylor, P.F Fleig, S.L Hietala
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 185 KB
english, 1998
76

Study on chromium oxide synthesized by unbalanced magnetron sputtering

Da-Yung Wang, Jian-Hong Lin, Wei-Yu Ho
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 621 KB
english, 1998
77

Strength of HVOF coating–substrate interfaces

C.M Nygårds, K.W White, K Ravi-Chandar
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 316 KB
english, 1998
78

Indentation of graded substrates

A.E. Giannakopoulos
Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 562 KB
english, 1998
79

Editorial

Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 58 KB
english, 1998
80

Index

Journal:
Thin Solid Films
Year:
1998
File:
PDF, 100 KB
1998
81

Index

Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 140 KB
english, 1998
82

Conference

Journal:
Thin Solid Films
Year:
1998
Language:
english
File:
PDF, 55 KB
english, 1998