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A low temperature integrated aluminum metallization technology for ULSI devices
Ted, Liang Y Chen, Dirk Brown, Paul Besser, Steve Voss, Rod MoselyVolume:
332
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(98)01032-3
File:
PDF, 991 KB
english, 1998