Texture and surface roughness of PRCVD aluminum films
D. Yang, R. Jonnalagadda, B.R. Rogers, J.T. Hillman, R.F. Foster, T.S. CaleVolume:
332
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(98)01034-7
File:
PDF, 1.22 MB
english, 1998