On the energy influx to the substrate during sputter...

On the energy influx to the substrate during sputter deposition of thin aluminium films

H. Kersten, G.M.W. Kroesen, R. Hippler
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Volume:
332
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(98)01067-0
File:
PDF, 638 KB
english, 1998
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