On the energy influx to the substrate during sputter deposition of thin aluminium films
H. Kersten, G.M.W. Kroesen, R. HipplerVolume:
332
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(98)01067-0
File:
PDF, 638 KB
english, 1998