Effect of external magnetic field on c-axis orientation and...

Effect of external magnetic field on c-axis orientation and residual stress in AlN films

Kazuya Kusaka, Takahiro Ao, Takao Hanabusa, Kikuo Tominaga
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Volume:
332
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)01095-5
File:
PDF, 335 KB
english, 1998
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