Structure and optical properties of Si incorporated...

Structure and optical properties of Si incorporated diamond-like carbon films deposited by r.f. plasma-assisted chemical vapor deposition

Soonil Lee, Dong-Sup Kim, Sung-Gyu Rhee, Soo-ghee Oh, Kwang-Ryeol Lee
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Volume:
341
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)01527-2
File:
PDF, 235 KB
english, 1999
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