Structure and optical properties of Si incorporated diamond-like carbon films deposited by r.f. plasma-assisted chemical vapor deposition
Soonil Lee, Dong-Sup Kim, Sung-Gyu Rhee, Soo-ghee Oh, Kwang-Ryeol LeeVolume:
341
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)01527-2
File:
PDF, 235 KB
english, 1999