Volume 341; Issue 1-2

Thin Solid Films

Volume 341; Issue 1-2
2

Sol-gel derived (La, Sr)CoO3 thin films on silica glass

B.J Kim, J Lee, J.B Yoo
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 2.15 MB
english, 1999
4

Nanotechnology towards the 21st Century

K Tanaka
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 812 KB
english, 1999
7

Thermal stability of TiN/AlN superlattices

M Setoyama, M Irie, H Ohara, M Tsujioka, Y Takeda, T Nomura, N Kitagawa
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 588 KB
english, 1999
11

Development of a large-area transformer coupled plasma source

H.J Kim, K.H Han, N.S Yoon, Y.S Hwang
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 193 KB
english, 1999
14

Effects of CdS substrates on the physical properties of polycrystalline CdTe Films

Y.H Lee, W.J Lee, Y.S Kwon, G.Y Yeom, J.K Yoon
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 248 KB
english, 1999
15

TFT-LCD technology

M. Katayama
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 1.20 MB
english, 1999
18

Advanced plasma technology in microelectronics

C.O Jung, K.K Chi, B.G Hwang, J.T Moon, M.Y Lee, J.G Lee
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 1.84 MB
english, 1999
19

RuO2 thin film fabrication with plasma-enhanced chemical vapor deposition

Sung-Eon Park, Hyun-Mi Kim, Ki-Bum Kim, Seok-Hong Min
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 170 KB
english, 1999
21

SiO2 Etching using high density plasma sources

T Tsukada, H Nogami, Y Nakagawa, E Wani, K Mashimo, H Sato, S Samukawa
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 1.26 MB
english, 1999
22

Advanced PECVD processes for highly electron emitting diamond-like-carbon

J. Jang, J.H. Moon, E.J. Han, S.J. Chung
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 313 KB
english, 1999
28

Phase transformation phenomena from α type to γ type one of Fe2O3 thin film deposited by PECVD

B.J. Kim, E.T. Lee, G.E. Jang
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 740 KB
english, 1999
29

Effects of substrate bias voltage on properties of CoCrTa/Cr media

S.H. Kim, K.H. Shin, T.D. Lee
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 575 KB
english, 1999
30

The nucleation of highly oriented diamond on silicon using a negative bias

Y.K Kim, K.H Lee, M.J Lee, J.Y Lee
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 926 KB
english, 1999
32

Ion beam sputtering of SnO2 with low energy oxygen ion beams

Y.-S Choe, J.-H Chung, D.-S Kim, H.K Baik
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 232 KB
english, 1999
33

β-SiC Thin film growth using microwave plasma activated CH4-SiH4 sources

H.S Kim, Y.J Park, I.H Choi, Y-.J Baik
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 1007 KB
english, 1999
34

In situ ellipsometry studies of temperature-dependent Au thin-film growth

S Lee, J Hong, S.G Oh
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 213 KB
english, 1999
35

Properties of the plasma produced by multi-cathode electron beam plasma sources

Y.B Kang, H Jeon, T.Y Kim, K.H Chung, D.K Ko, J.K Jung, S.J Noh
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 170 KB
english, 1999
37

Lateral force microscopy study of functionalized self-assembled monolayer surfaces

Yun Kim, Kwang-Salk Kim, Mingyu Park, Jaein Jeong
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 628 KB
english, 1999
38

Analysis of electrically non-conducting sample structures with electron and mass spectroscopic methods

H Oechsner
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 225 KB
english, 1999
39

Electrical properties of reactively sputtered CNx films

M.A Monclus, D.C Cameron, A.K.M.S Chowdhurry
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 266 KB
english, 1999
40

ECWR-Plasma CVD as a novel technique for phase controlled deposition of semiconductor films

H. Oechsner, M. Scheib, H. Goebel
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 202 KB
english, 1999
41

Fabrication of gated diamond field emitter array using a selective diamond growth process

S.C Ha, D.H Kang, K.B Kim, S.H Min, I.H Kim, J.D Lee
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 670 KB
english, 1999
43

Large area deposition of thick diamond film by direct-current PACVD

Y.J Baik, J.K Lee, W.S Lee, K.Y Eun
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 629 KB
english, 1999
44

A study of GaN etch mechanisms using inductively coupled Cl2/Ar plasmas

Hyeon-Soo Kim, Geun-Young Yeom, Jae-Won Lee, Tae-Il Kim
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 370 KB
english, 1999
49

ITO/Ag/ITO multilayer films for the application of a very low resistance transparent electrode

K.H Choi, J.Y Kim, Y.S Lee, H.J Kim
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 594 KB
english, 1999
50

Reduction of intrinsic stress in cubic boron nitride films

J. Ullmann, A.J. Kellock, J.E.E. Baglin
Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 254 KB
english, 1999
51

Editorial

Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 38 KB
english, 1999
52

Conference

Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 20 KB
english, 1999
53

Index

Journal:
Thin Solid Films
Year:
1999
File:
PDF, 54 KB
1999
54

Index

Journal:
Thin Solid Films
Year:
1999
Language:
english
File:
PDF, 85 KB
english, 1999