Detection by emission spectroscopy of active species in plasma–surface processes
A. Ricard, T. Czerwiec, T. Belmonte, S. Bockel, H. MichelVolume:
341
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(98)01529-6
File:
PDF, 592 KB
english, 1999