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Investigation of surface polymerization on silicon exposed to C4F8 helicon wave plasmas
Weon-Jeong Lee, Hyeon-Soo Kim, Geun-Young Yeom, Jong-Tae BaekVolume:
341
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(98)01549-1
File:
PDF, 171 KB
english, 1999