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Characterization of silicon oxynitride films by grazing-emission X-ray fluorescence spectrometry
M.L. Monaghan, T. Nigam, M. Houssa, S. De Gendt, H.P. Urbach, P.K. de BokxVolume:
359
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(99)00739-7
File:
PDF, 218 KB
english, 2000