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Real-time spectroscopic ellipsometry from 1.5 to 6.5 eV
J.A Zapien, R.W Collins, R MessierVolume:
364
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(99)00916-5
File:
PDF, 279 KB
english, 2000