Interfacial Oxygen Thermodonor Formation in...

Solid State Phenomena 2002 Vol. 82-84

Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon

Kamaev, G.N., Bolotov, V.V., Chern'aev, S.A., Efremov, M.D.
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Volume:
82-84
Year:
2002
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.82-84.99
File:
PDF, 315 KB
2002
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