Preparation and characterization of highly oriented...

Vacuum 2000 Vol. 59; Iss. 2-3

Preparation and characterization of highly oriented Pb(Zr, Ti)O3 thin films with seeding titanium layer deposited at low temperature by facing target sputtering

Xin-Shan Li, Tsunehisa Tanaka, Yoshihiko Suzuki
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Volume:
59
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0042-207x(00)00350-x
File:
PDF, 211 KB
english, 2000
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