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Effects of ion flux on the properties of dc magnetron-sputtered stainless steel films
Shozo Inoue, Toshiaki Saeki, Hitoshi Uchida, Keiji Koterazawa, Mikio IwasaVolume:
66
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(02)00151-3
File:
PDF, 151 KB
english, 2002