The structure of TiN films deposited by arc ion plating
Tatsuya Matsue, Takao Hanabusa, Yasukazu IkeuchiVolume:
66
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(02)00167-7
File:
PDF, 157 KB
english, 2002