K-M-S (keep-molecules sputtering) deposition of optical...

K-M-S (keep-molecules sputtering) deposition of optical MgF2 thin films

K Kawamata, T Shouzu, N Mitamura
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Volume:
51
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0042-207x(98)00253-x
File:
PDF, 451 KB
english, 1998
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