K-M-S (keep-molecules sputtering) deposition of optical MgF2 thin films
K Kawamata, T Shouzu, N MitamuraVolume:
51
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0042-207x(98)00253-x
File:
PDF, 451 KB
english, 1998