Compact sputtering apparatus for depositing Co–Cr alloy thin films in magnetic disks
Yoshitaka Kitamoto, Masanori Abe, Masahiko NaoeVolume:
51
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(98)00256-5
File:
PDF, 347 KB
english, 1998