Pattern Collapse and Particle Removal Forces of Interest to...

Pattern Collapse and Particle Removal Forces of Interest to Semiconductor Fabrication Process

Kim, Tae Gon, Wostyn, Kurt, Park, Jin Goo, Mertens, Paul W., Busnaina, Ahmed A.
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Volume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.145-146.47
File:
PDF, 2.92 MB
english, 2009
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