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Pt Etching Method at Low Temperature Using Electrolyzed Sulfuric Acid Solution
Ogawa, Yuichi, Uchida, Minoru, Otsu, Toru, Nagai, Tatsuo, Morita, HiroshiVolume:
219
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.219.101
Date:
September, 2014
File:
PDF, 408 KB
english, 2014