Hydrogen-Induced Shallow Donors in Silicon and Silicon-on-Insulator Structures Formed by Hydrogen Slicing
Popov, V.P., Kilanov, D.V., Antonova, I.V., Naumova, O.V., Stepovik, A.P., Gromov, V.T., Misiuk, AndrzejVolume:
82-84
Year:
2002
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.82-84.497
File:
PDF, 410 KB
2002