Scratch-Related Effects on Silicon Surface
Shreter, Y.G., Rebane, Y.T., Tarhin, D.V., Cherns, D., Steeds, John W.Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1231
File:
PDF, 365 KB
1995