Impact of Surface Treatment of Si3N4 on Subsequent SiO2...

Solid State Phenomena 2014 / 9 Vol. 219

Impact of Surface Treatment of Si3N4 on Subsequent SiO2 Deposition

Milanesi, Francesca, Vendrame, Silvio, Ravizza, Enrica, Spadoni, Simona, Pipia, Francesco, Livellara, Luisito
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Volume:
219
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.219.36
Date:
September, 2014
File:
PDF, 1.40 MB
english, 2014
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