A New Industrial Etching & Drying Process for MEMS to Prevent Collapse of Microstructures
Raccurt, O., Arnaud d'Avitaya, F., Charlaix, E., Vareine, T., Tardif, F.Volume:
92
Year:
2003
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.92.73
File:
PDF, 300 KB
2003