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Optical proximity correction by grey tone photolithography
Zheng Cui, Jinglei Du, Qizhong Huang, Jingqin Su, Yongkang GuoVolume:
53
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(00)00285-9
File:
PDF, 1.34 MB
english, 2000