Nanofabrication of quantum wires on (100) Si and SiGe by shifted-resist pattern and anisotropic wet etching
E. Giovine, E. Cianci, V. Foglietti, A. Notargiacomo, F. EvangelistiVolume:
53
Year:
2000
Language:
english
Pages:
3
DOI:
10.1016/s0167-9317(00)00300-2
File:
PDF, 769 KB
english, 2000