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Electron beam induced deposition of metallic tips and wires for microelectronics applications
I. Utke, B. Dwir, K. Leifer, F. Cicoira, P. Doppelt, P. Hoffmann, E. KaponVolume:
53
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(00)00311-7
File:
PDF, 1.69 MB
english, 2000