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Bias printing of APSM resists for 180 nm contact holes
G. Teng, G. Prokopowicz, D. Kang, C. Xu, J. Thackeray, T. Duong, G. OrsulaVolume:
53
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(00)00355-5
File:
PDF, 915 KB
english, 2000