Coding gray-tone mask for refractive microlens fabrication
Jun Yao, Jingqin Su, Jinglei Du, Yixiao Zhang, Fuhua Gao, Feng Gao, Yongkang Guo, Zheng CuiVolume:
53
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(00)00371-3
File:
PDF, 991 KB
english, 2000