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Comparison of experimental and Monte Carlo results of stochastic Coulomb interaction in projection beam lithography
P.W.H. de Jager, B. Mertens, E. Munro, E. Cekan, G. Lammer, H. Vonach, H. Buschbeck, M. Zeininger, C. Horner, H. Löschner, G. Stengl, A.J. BleekerVolume:
53
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(00)00390-7
File:
PDF, 878 KB
english, 2000