Effect of a thin Ta layer on the C49–C54 transition

Microelectronic Engineering 2001 Vol. 55; Iss. 1-4

Effect of a thin Ta layer on the C49–C54 transition

F. La Via, F. Mammoliti, M.G. Grimaldi, S. Quilici, F. Meinardi
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Volume:
55
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(00)00437-8
File:
PDF, 149 KB
english, 2001
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