Interface characteristics between tungsten silicide electrodes and thin dielectrics
B. Sell, J. Willer, K. Pomplun, A. Sänger, D. Schumann, W. KrautschneiderVolume:
55
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(00)00448-2
File:
PDF, 503 KB
english, 2001