Plasma ash modulation of TDDB thermal activation energy in...

Semiconductor Science and Technology 2007 / 04 Vol. 22; Iss. 4

Plasma ash modulation of TDDB thermal activation energy in damascene SiOC:H

Li, Yunlong, Tokei, Zsolt, Aelst, Joke Van, Carbonell, Laureen, Baklanov, Mikhaïl R, Richard, Olivier, Bender, Hugo, Groeseneken, Guido, Maex, Karen
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Volume:
22
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/22/4/004
Date:
April, 2007
File:
PDF, 792 KB
english, 2007
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