Fabrication of optical transmission elements in an SiNx...

Fabrication of optical transmission elements in an SiNx membrane

Chien Chieh Lee, Yu Cheng Chang, Jenq Yang Chang, Chien Feng Chiu, Guo Chung Chi
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Volume:
69
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(03)00223-5
File:
PDF, 505 KB
english, 2003
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