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Volume 69; Issue 1
Main
Microelectronic Engineering
Volume 69; Issue 1
Microelectronic Engineering
Volume 69; Issue 1
1
Fabrication of optical transmission elements in an SiNx membrane
Chien Chieh Lee
,
Yu Cheng Chang
,
Jenq Yang Chang
,
Chien Feng Chiu
,
Guo Chung Chi
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 505 KB
Your tags:
english, 2003
2
Mechanical stress evolution in metal interconnects for various line aspect ratios and passivation dielectrics
Young-Bae Park
,
In-Su Jeon
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 642 KB
Your tags:
english, 2003
3
Self-excited piezoelectric microcantilever for gas detection
Jia Zhou
,
Po Li
,
Song Zhang
,
Yiping Huang
,
Pengyuan Yang
,
Minhang Bao
,
Gang Ruan
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 485 KB
Your tags:
english, 2003
4
Simultaneous dose modification for balanced E-beam proximity correction minimizing CD error
S.-Y. Lee
,
D. He
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 375 KB
Your tags:
english, 2003
5
Fabrication of a miniaturized electron lens system and laser micro-machining condition for silicon membrane
Seungjoon Ahn
,
Dae-Wook Kim
,
Ho Seob Kim
,
Seong Joon Ahn
,
Jaewon Cho
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 446 KB
Your tags:
english, 2003
6
Formation of C54 TiSi2 in a cosputtered (Ti+Si) blanket film in the presence of a TiN capping layer
Joshua Pelleg
,
Y. Shor
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 607 KB
Your tags:
english, 2003
7
Investigation into patterning of a stack-type Ru electrode capacitor
Hyoun Woo Kim
,
Chang-Jin Kang
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 581 KB
Your tags:
english, 2003
8
Effect of rapid thermal process on oxygen precipitation and denuded zone in nitrogen-doped silicon wafers
Xuegong Yu
,
Deren Yang
,
Xiangyang Ma
,
Duanlin Que
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 321 KB
Your tags:
english, 2003
9
Editorial Board
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 6 KB
Your tags:
english, 2003
10
Electrochemical characterization of copper chemical mechanical polishing
Tianbao Du
,
Dnyanesh Tamboli
,
Vimal Desai
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 621 KB
Your tags:
english, 2003
11
Improving Cu metallization of Si by electrodeposition under centrifugal fields
Ali Eftekhari
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 146 KB
Your tags:
english, 2003
12
Control of carbon nanotube’s shape by ion bombardment
Hyuck Lim
,
Hunjoon Jung
,
Seung-Ki Joo
Journal:
Microelectronic Engineering
Year:
2003
Language:
english
File:
PDF, 761 KB
Your tags:
english, 2003
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