Simultaneous dose modification for balanced E-beam...

Simultaneous dose modification for balanced E-beam proximity correction minimizing CD error

S.-Y. Lee, D. He
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Volume:
69
Year:
2003
Language:
english
Pages:
10
DOI:
10.1016/s0167-9317(03)00228-4
File:
PDF, 375 KB
english, 2003
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