Fabrication of a miniaturized electron lens system and laser micro-machining condition for silicon membrane
Seungjoon Ahn, Dae-Wook Kim, Ho Seob Kim, Seong Joon Ahn, Jaewon ChoVolume:
69
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(03)00229-6
File:
PDF, 446 KB
english, 2003