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Low-k dielectrics: a non-destructive characterization by infrared spectroscopic ellipsometry
P. Boher, C. Defranoux, M. Bucchia, C. GuillotinVolume:
70
Year:
2003
Language:
english
Pages:
10
DOI:
10.1016/s0167-9317(03)00466-0
File:
PDF, 773 KB
english, 2003